Kinetic analysis of 2D Mo2C crystal growth via CVD
نویسندگان
چکیده
Abstract We investigated the growth mechanism of 2D Mo2C crystals by chemical vapor deposition (CVD) under various time and temperature conditions. The kinetics on Cu via were using a modified Johnson-Mehl-Avrami-Kolmogorov (JMAK) model. To analyze surface coverage, we employed scanning electron microscopy (SEM) applied model to determine rate activation energy. exhibited temperature-dependent behavior, described Arrhenius relationship, with an apparent energy 4 eV. Avrami plot exponent 3, indicating complex process nucleation growth.
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ژورنال
عنوان ژورنال: Physica Scripta
سال: 2023
ISSN: ['1402-4896', '0031-8949']
DOI: https://doi.org/10.1088/1402-4896/acf9ce